FS1012 Datasheet Gas and Liquid Flow Sensor Module Description Features The FS1012 MEMS mass flow sensor module measures the flow Gas or liquid mediums rate using the thermo-transfer (calorimetric) principle. The FS1012 Robust solid isolation technology is capable of measuring a gas or liquid medium. Resistant to surface contamination The FS1012 offers key advantages over resistor-based flow No cavity to cause clogging solutions. The sensor utilizes thermopile sensing, which provides Resistant to vibration and pressure shock an excellent signal-to-noise ratio. The sensor comprises a solid Low power application thermal isolation technology and silicon-carbide coating to protect it from abrasive wear and provides robustness and long-term Sensitive at low flow rates and differential pressure levels reliability. In comparison, other sensors typically contain a fragile Fast response: <5ms membrane above an etched cavity for the thermal isolation base. Millivolt output The FS1012 features the sensor fully assembled and wire-bonded Supply voltage: 3V to 5V out to a 6-pin header. Wetted materials consist of a glass fiber Module operating temperature range: 0C to +85C reinforced PA66 resin, epoxy, and silicon carbide. FS1012 Flow Sensor Module Typical Applications Process controls and monitoring Oil and gas leak detection HVAC and air control systems CPAP and respiratory devices Liquid dispensing system Basic Application Circuits Figure 1. Single-Ended Circuit Example Figure 2. Differential Circuit Example 3V to 5V 3V to 5V Flow Sensor Flow Sensor HTR1 HTR1 HTR2 Microcontroller/ASIC HTR2 Microcontroller/ASIC Input Offset Adjustment Differential Amp + SPI SPI + TP1+ TP1+ + + 2 2 ADC I C ADC I C TP1 TP1 TP2+ PWM PWM + OFFSET TP2 Gain: 20X to 100x Gain: 20X to 100x GND GND 2018 Integrated Device Technology, Inc. 1 November 19, 2018 FS1012 Datasheet Pin Assignments Figure 3. Pin Assignments for Module Top View Pin Descriptions Table 1. Pin Descriptions Pin Number Pad Name Type Description 1 TP1+ Output Thermopile 1 (+) 2 TP1 Output Thermopile 1 () 3 HTR1 Input Heater 4 HTR2 Input Heater 5 TP2 Output Thermopile 2 () 6 TP2+ Output Thermopile 2 (+) 2018 Integrated Device Technology, Inc. 2 November 19, 2018