SCA103T Series Data Sheet THE SCA103T DIFFERENTIAL INCLINOMETER SERIES The SCA103T Series is a 3D-MEMS-based single axis inclinometer family that uses the differential measurement principle. The high calibration accuracy combines extremely low temperature dependency, high resolution and low noise together with a robust sensing element design, to make the SCA103T an ideal choice for high accuracy leveling instruments. The Murata inclinometers are insensitive to vibration due to having over damped sensing elements plus they can withstand mechanical shocks of 20000 g. Features Measuring ranges 15 SCA103T-D04 and Ratiometric analog voltage outputs 30 SCA103T-D05 Digital SPI inclination and temperature output 0.001 resolution (10 Hz BW, analog output) Comprehensive failure detection features Sensing element controlled over damped o True self test by deflecting the sensing frequency response (-3dB 18Hz) elements proof mass by electrostatic force. Robust design, high shock durability (20000g) o Continuous sensing element interconnection failure check. Excellent stability over temperature and time o Continuous memory parity check. Common mode error and noise reduction RoHS compliant using the differential measurement principle Compatible with Pb-free reflow solder process Single +5 V supply Applications Platform leveling and stabilization Leveling instruments Rotating laser levels Construction levels 12 VDD Sensing Signal conditioning 11 OUT 1 element 1 and filtering A/D conversion 10 ST 1 Self test 1 EEPROM Temperature calibration 1 SCK Sensor memory 9 ST 2 Self test 2 3 MISO SPI interface 4 MOSI 7 CSB Sensing Signal conditioning 5 OUT 2 element 2 and filtering 6 GND Figure 1. Functional block diagram Murata Electronics Oy Subject to changes 1/17 www.muratamems.fi Doc.Nr. 8261700 Rev.A3 SCA103T Series TABLE OF CONTENTS The SCA103T Differential Inclinometer Series ....................................................................... 1 Features............................................................................................................................................. 1 Applications ...................................................................................................................................... 1 Table of Contents...................................................................................................................... 2 1 Electrical Specifications ..................................................................................................... 3 1.1 Absolute Maximum Ratings ................................................................................................... 3 1.2 Performance Characteristics .................................................................................................. 3 1.3 Electrical Characteristics ....................................................................................................... 4 1.4 SPI Interface DC Characteristics ............................................................................................ 4 1.5 SPI Interface AC Characteristics ............................................................................................ 4 1.6 SPI Interface Timing Specifications ....................................................................................... 5 1.7 Electrical Connection.............................................................................................................. 6 1.8 Typical Performance Characteristics .................................................................................... 6 1.8.1 Additional External Compensation ...................................................................................... 7 2 Functional Description ....................................................................................................... 8 2.1 Differential Measurement ....................................................................................................... 8 2.2 Voltage to Angle Conversion ................................................................................................. 9 2.3 Ratiometric Output ................................................................................................................ 10 2.4 SPI Serial Interface ................................................................................................................ 10 2.5 Digital Output to Angle Conversion ..................................................................................... 12 2.6 Self Test and Failure Detection Modes ................................................................................ 13 2.7 Temperature Measurement .................................................................................................. 14 3 Application Information .................................................................................................... 15 3.1 Recommended Circuit Diagrams and Printed Circuit Board Layouts ............................... 15 3.2 Recommended Printed Circuit Board Footprint ................................................................. 16 4 Mechanical Specifications and Reflow Soldering .......................................................... 16 4.1 Mechanical Specifications (Reference only) ....................................................................... 16 4.2 Reflow Soldering ................................................................................................................... 17 Murata Electronics Oy Subject to changes 2/17 www.muratamems.fi Doc.Nr. 8261700 Rev.A3