SI & SA series high-precision inertial sensors The capacitive inclinometers and accelerometers are based on single crystal silicon sensor elements and utilize state-of-the-art micromachining technology to achieve large signal-to-noise ratios and excellent stability over temperature. Due to high aspect ratio microstructures (HARMS) the sensors feature ultra- low cross axis sensitivities. The patented AIM (Air gap Insulated Microstructures) technology minimizes parasitic capacitances. Benefits of the AIM technology Features of the sensor system Certificates Ultra-low cross axis sensitivity due to Dual axis measurement Quality Management System according to HARMS technology Excellent stability over temperature EN ISO 9001 Thin-film free mechanical components, Digital SPI interface Qualified according to DIN EN 60068, single crystal silicon based High resolution ADC oeff ring more than DIN EN 60749, MIL-STD-883 Minimizing of parasitic capacitances due to 100dB dynamic range RoHS and REACH compliant insulation of the functional components by Configurable bandwith output filter air gap Shock survival 1500 g Applications Complete dry processing Hermetically sealed package Excellent thermal performance Customized sensor solutions for packaging Geoengineering Large signal-to-noise ratio and signal processing Condition monitoring Mechanical over-damped to reduce parasitic Navigation signals Security systems Customer specific measurement ranges Platform control and stabilization due to flexible adjustment of mass, spring Tilt sensing and leveling and damping Industrial applications E / 4 Subject to change without notice www.first-sensor.com contact first-sensor.com Page 1/20SI & SA series high-precision inertial sensors Performance characteristics ASSP Parameter Condition Min. Typ. Max. Unit pF Supported nominal capacitance 0.25 15 Differential capacitance range -750 750 fF Input noise at max. gain settings 50 zF/Hz Linearity at max. voltage output 11 Bit ADC dynamic range in 100 Hz BW 100 dB Output bandwidth 3 420 Hz Output data rate 6 1563 Hz ASSP resolution 2s complement 24 Bit Supply voltage 4.75 5.00 5.25 V Supply current 20 24 28 mA Power down current 1 A Operating temperature range -40 85 C Resolution temperature sensor 14 Bit Sensitivity temperature sensor 80 LSB/K (1) Typical performance characteristics Inclinometer SI-11.S1.C-30 Sensor-ASSP system Parameter Condition SI-11.S1.C-30 Unit Measurement range Full scale (linear 30) 30 (90) Resolution 10 Hz < 0.0015 Scale factor (repeatability) Short-term 35 ppm Scale factor (temperature coefficient) Without calibration 50 ppm/K Bias (repeatability) Short-term 0.0030 Bias (temperature coefficient) Without calibration 0.0025 /K Non-linearity Full scale < 0.3 % Noise density < 0.0004 /Hz Digital interface SPI Capacitive sensing element Noise density calculated < 3.0 aF/Hz Capacitive sensitivity 450750 fF/g Frequency response 3dB frequency 150 Hz Damping ratio 1.5 Measurement voltage RMS < 1.2 V Shock survival Bare die > 2500 g Specification note (1) Maximum and minimum ratings of the performance parameters depend on the exact set-up of the sensor settings. Please contact First Sensor for further information. E / 4 Subject to change without notice www.first-sensor.com contact first-sensor.com Page 2/20